Rugged instrumentation for reliable measurement and control

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Semiconductor Humidity and Temperature Control

Semiconductor facilities require close monitoring of humidity in their HVAC and fab rooms. The HTZ Humidity and Temperature transmitter has a versatile duct mounted sensor assembly that is ideal for monitoring humidity and temperature in a duct.  

Semiconductor Humidity and Temperature Control

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Additionally, the sensor can be wall mounted for clean room humidity and temperature monitoring.  The HART programmable HTZ has a remote display and has two analog outputs that can be programmed to output humidity, temperature or dew point.  

Key Attributes:

  • Versatile duct mount/wall mount designed humidity sensor
  • +/- .75% humidity measurement
  • HART programmable with two outputs and local display

Extended Applications Semiconductor & Microelectronics